Wafer Surface Defect
收藏IEEE2026-04-17 收录
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https://ieee-dataport.org/documents/wafer-surface-defect
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资源简介：
The dataset is a self-constructed wafer surface defect dataset, with each image captured in real-time. The extraction and segmentation of wafer image have been performed, and each image represents a single individual die. The dataset primarily includes images of defect-free dies, as well as four types of defective images: particle, scratch, stain, and liquid residual. A total of 500 images are included, and the various types of defects within the images have been annotated using the Make Sense online annotation tool. The location and category information of the defects are stored in YOLO format as txt files. Each image has a resolution of 680×680 pixels.
提供机构：
Li, Mengyun
