Wafer Surface Defect

The dataset is a self-constructed wafer surface defect dataset, with each image captured in real-time. The extraction and segmentation of wafer image have been performed, and each image represents a single individual die. The dataset primarily includes images of defect-free dies, as well as four types of defective images: particle, scratch, stain, and liquid residual. A total of 500 images are included, and the various types of defects within the images have been annotated using the Make Sense online annotation tool. The location and category information of the defects are stored in YOLO format as txt files. Each image has a resolution of 680×680 pixels.本数据集为自主构建的晶圆表面缺陷数据集，所有图像均通过实时拍摄获取。已完成晶圆图像的提取与分割处理，每张图像对应单个独立的晶圆裸片（die）。本数据集主要包含无缺陷晶圆裸片图像，以及四类缺陷晶圆图像：颗粒缺陷、划痕、污渍与残液缺陷。数据集总计包含500张图像，图像内的各类缺陷均通过Make Sense在线标注工具完成标注。缺陷的位置与类别信息以YOLO格式的txt文件存储。每张图像的分辨率均为680×680像素。

搜集汇总

背景与挑战

背景概述

该数据集是一个自建的晶圆表面缺陷数据集，包含500张实时拍摄的高分辨率图像（680×680像素），涵盖无缺陷晶粒及粒子、划痕、污渍和液体残留四类缺陷。所有缺陷已用YOLO格式进行标注，适用于机器学习和计算机视觉中的目标检测任务。