Data for: "ReaxFF Molecular Dynamics Simulation Study of Nanoelectrode Lithography Oxidation Process on Silicon (100) Surface"
收藏Mendeley Data2024-03-27 更新2024-06-28 收录
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https://pureportal.strath.ac.uk/en/datasets/b5a4fdb7-ddc0-431a-a3c5-d2d9a28df99f
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资源简介：
MD simulation data includes chemical compositions, Oxide thickness, RDFs of oxide film, number of Oxygen atoms along the Z axis in the oxide film, Oxide thickness for the variation of efield, Oxide thickness for the variation of RH.
创建时间：
2023-06-28
