Statistical perception of chaotic fabrication error and self-adaptive processing decision in ultra-precision optical polishing
收藏科学数据银行2023-02-07 更新2026-04-23 收录
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https://www.scidb.cn/detail?dataSetId=c010c98b55394a9aaa3994eecc8df086
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资源简介：
An ultra-precision surface with equivalent accuracy can be stably realised via proper tool influence function (TIF) selection and modification, even for low-deterministic level tools. Experimental results indicated that the average prediction error in each convergence cycle was reduced to 6.14%. Without manual participation, the root mean square(RMS) of the surface figure of a ϕ100-mm flat mirror was converged to 1.788 nm with only robotic small-tool polishing, and that of a ϕ300-mm high-gradient ellipsoid mirror was converged to 0.008 λ. Additionally, the polishing efficiency was increased by 30% compared with that of manual polishing. The proposed SCP model offers insights that will help achieve advancement in the subaperture polishing process.
提供机构：
Songlin Wan; Shanghai Institute of Optics and Fine Mechanics; Zhenqi Niu; Jianda Shao; Hanjie Li; Chaoyang Wei; Lanya Zhang
创建时间：
2023-02-05
