Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality.
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下载链接：
http://eprints.soton.ac.uk/375764/
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资源简介：
Data used in publication:
Wing H. Ng, Nina Podoliak, Peter Horak, Jiang Wu, Huiyun Liu, William J. Stewart, and Anthony J. Kenyon,
"Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality"
submitted to SPIE Microtechnologies conference, 4-6 May 2015, Barcelona, Spain
提供机构：
University of Southampton
创建时间：
2015-04-17
