Date of infrared absorption suppressed terahertz metamaterial absorber

Fig. 1. (a) 3D schematic of the infrared-resisted TMA structure; Surface images of fabricated TMA for (b) Scanning electron microscopy image; (c) Optical microscopic image.Fig. 2. Simulation results of TMA absorbance, reflectance and transmission in (a) THz waveband 1.0–2.0 THz; and (b) Infrared waveband 10–30 THz (10–30 µm). Fig. 3. Experimental results of TMA absorption spectrum curves in (a) THz waveband 0.75–2.0 THz; and (b) Inferred waveband 12–120 THz. Red lines are experimental results; black lines are simulations.Fig. 4. Simulation of three-dimensional electric field distribution for resonance frequency THz wave, the electric field direction of TEM wave in (a) is parallel to the y-axis, and in (b) is parallel to the x-axis.Fig. 5. The relationships between structural parameters and absorption spectrum. (a1–a2) IR and Terahertz absorption with different slit width; (b1–b2) IR and Terahertz absorption with different dielectric layer thickness; (c1–c2) IR and Terahertz absorption with different radius. Here the dielectric layer thickness in (a1) and (c1) is t2 = 4µm, and that in (a2) and (c2) is t2 = 12µm.Fig. S1. (a) TMA pattern used in simulation; (b) Infrared absorption spectrum simulation results of TMA.Fig. S2. The diagrammatic sketch of the fabrication process of the designed TMA.Fig. S3. The design of terahertz detection device: (a) Side sectional view of a typical terahertz sensor, (b) the TMA design with vacuum cavity, (c) simulation result of TMA absorbance.Fig. S4. Simulation of nine kinds of thin slit patterns for (a) slit patterns of the surface metal; (b) 10–30 THz absorption results obtained by simulation.Fig. S5. THz absorptivity varying with incident angle. Fig. S6. THz absorptivity varying with polarization direction.