Self-Aligned Patterning of Tantalum Oxide on Cu/SiO2 through Redox-coupled Inherently Selective Atomic Layer Deposition
收藏DataCite Commons2023-07-27 更新2024-08-18 收录
下载链接：
https://springernature.figshare.com/articles/dataset/Self-Aligned_Patterning_of_Tantalum_Oxide_on_Cu_SiO2_through_Redox-coupled_Inherently_Selective_Atomic_Layer_Deposition/22815749
下载链接
链接失效反馈官方服务：
资源简介：
Source data for Self-Aligned Patterning of Tantalum Oxide on Cu/SiO2 through Redox-coupled Inherently Selective Atomic Layer Deposition
提供机构：
figshare
创建时间：
2023-05-14
