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Surface-topography challenge - TINT - sample S93 - rough

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DataCite Commons2024-11-07 更新2025-04-09 收录
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资源简介:
A "rough" sample size is approximately 1 cm x 1 cm, nominally flat square wafer with 0.50 mm thickness. The “rougher surface” – CrN deposited on the rough “backside” of a single-side-polished silicon wafer, which has been subsequently etched with isotropic reactive ion etching.
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2024-11-07
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