Graphs and figures related to the microstructure properties of black aluminum antireflective films.

The files are related to the manuscript „Microstructure and physical properties of Black-Aluminum antireflective films“ and are organized in the sequence of appearance in the manuscript. The nomenclature of the files follows the sequence: Figure, number of the figure appearing in the manuscript (from 1 – 7), type of data (XRD, AFM, TEM, EDX, PALS, Reflectance, Carrier concentration, Electrical mobility, or resistivity), thin film sample related to (R-Al or B-Al), film thickness (60, 180, 250, 320, or 410 nm). TEM image files are raw, as collected, while the ones in the manuscript were cropped to show the differences between the films.