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Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement (Data)

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Zenodo2021-11-23 更新2026-05-25 收录
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Origin projects, figures and COMSOL simulation used for the article "Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement", published in <em>Journal of Micromechanics and Microengineering </em>on 05 Nov 2019.

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2021-11-23
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