3D Au Nanoparticle Lattices in MoO3 for Tunable Optical and Thermo-Electrical Properties

The data set contains measured values for GISAXS, XRD, optical absorption and temperature-resistance measurements for 3D lattices of gold (Au) nanoparticles (Au NPs) embedded in MoO3 matrix prepared under different conditions by magnetron sputtering. The data shows that embedding ordered three-dimensional lattices of Au NPs into MoO3 thin films via magnetron sputtering enables broad tunability
of optical and thermo-electrical behavior. The formation of regular Au NP lattices, with controlled particle sizes, interparticle separations, and ordering, is achieved through precise adjustment of de-
position temperature and layer thickness conditions. Localized surface plasmon resonances (LSPR) arising from Au NPs—and their coupling at small separations—induce strong modulation of optical absorption across a wide spectral range. Simultaneously, the film’s electrical resistance can be tuned by up to six orders of magnitude, while the activation energy and temperature coefficient of resistance (TCR) are reduced by up to fifty-fold compared to pure MoO3. These findings establish a scalable platform for designing oxide–plasmonic hybrid materials, highlighting their potential for next-generation optoelectronic, sensing, and energy-harvesting devices.