Data underlying the article: Finite element method for 3D optical modeling of liquid crystal on silicon spatial light modulator

This research is to shown an robust electromagnetic method suitable for multiscale simulation domain, especially for LCoS SLM. The data in Fig 4 are the simulated diffraction efficiency of a fictitious 2D LCoS SLM using typical FEM method, FEM combined with scattering matrix method, and the proposed method, which is using scatter matrix method to combine FEM and RCWA simulation. The data in Fig.5 contain both simulation and experimental results of an actual LCoS SLM device. The simulated data is obtained with FEM method that combines with the transferred matrix methods in comparison to the proposed method. The experimental data is obtained with LCoS SLM that displayed a 6 pixel blazed grating with pixel pitch 8um. <br>

本研究提出了一种适用于多尺度仿真领域的鲁棒电磁计算方法，尤其适配液晶硅基空间光调制器（LCoS SLM）。图4中的数据为虚构二维LCoS SLM的仿真衍射效率，分别采用经典有限元法（Finite Element Method, FEM）、有限元法结合散射矩阵法，以及本文提出的方法——该方法借助散射矩阵法实现有限元法与严格耦合波分析（Rigorous Coupled Wave Analysis, RCWA）的仿真融合。图5的数据涵盖实际LCoS SLM器件的仿真与实验结果：其中仿真数据采用结合传输矩阵法的有限元法获得，并与本文提出的方法进行对比。实验数据来自搭载6像素闪耀光栅、像素间距为8微米的LCoS SLM器件。