Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients d31 and d33 of AlN and AlScN Thin Films
收藏中国科学院中国科学技术大学科学数据中心2026-01-10 收录
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资源简介：
Accurate and efficient measurements of the piezoelectric properties of AlN and AlScN films are very important for the design and simulation of micro-electro-mechanical system (MEMS) sensors and actuator devices.
提供机构：
中国科学院上海微系统与信息技术研究所创建时间：
2023-05-23
