Multi-DOF Flexure-based Mechanism Design for Micro/Nano-scale Application

This thesis develops novel high-dexterity positioning mechanisms that enable nanoscopic motion while addressing common limitations of flexure-based designs. The mechanism employs an innovative snowflake-shaped hinge that improves the range of motion without compromising precision. It is further enhanced by utilising a robust nonlinear control algorithm that significantly attenuates tracking errors. A lightweight strain gauge-based sensing system integrated with a deep neural network model provides indirect sensing, mitigating the drawbacks of conventional sensors. An out-of-plane mechanism that incorporates a modified snowflake-shaped hinge is established to expand the degree-of-freedom. This research advances micro/nano-scale applications in precision engineering.