Silicon microcantilever with impedance sensor

The issue of microelectromechanical systems (MEMS) [1] has been enjoying popularity and interest since the 90s of the 20th century. Microcells are one of the simplest devices of this type, but they can be widely used in sensors. There are reports on the possibility of using this type of sensors in the context of such important issues as diagnostics of prostate cancer, myocardial infarction and glycemic monitoring. There is even the concept of creating a miniaturized biochip based on a series of microcantilever cells that can simultaneously detect several routinely diagnosed diseases in a clinical laboratory in combination with ultra-high sensitivity and high throughput. This collection contains 8 images of the microcantilever surface and its integrated impedance sensor elements. Imaging was performed in the semi-contact technique with the use of the NSG30 probe.
Reference:
[1] S. N. Trimmer, Microrobots and micromechanical systems. Sensors and Actuators, 19(3) (1989) 267–287, DOI:10.1016/0250-6874(89)87079-9