Integrated circuit structure surface images obtained with contact capacitive imaging technique

The measurements were done using NTEGRA Prima (NT-MDT) device. CSG 10Pt probe.
Scanning capacitance microscopy (SCM) is a type of scanning probe microscopy in which a probe is placed in contact with or in close proximity to the sample surface and scanned. The SCM characterizes the sample surface on the basis of information obtained from the change in capacity between the surface and the probe. Applications of the SCM technique include the mapping of the doping profile in semiconductor devices and the assessment of local dielectric properties in insulating layers. The presented images refer to the study of the dielectric properties of the protective conformal coating on the surface of an integrated circuit. The file contains 66 images.