Lithography stitching error analysis and compensation
收藏DataCite Commons2025-04-27 更新2025-04-16 收录
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资源简介：
The data set is the experimental data of the paper ' Alignment Accuracy Improvement in Laser Heat-mode Scanning Lithography System through Dual-galvanometer Coordinate Compensation ', including measurement data, simulation parameters, simulation results, experimental results, electron microscope images and microscope images.
提供机构：
Science Data Bank
创建时间：
2024-09-06
