Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications
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下载链接：
http://eprints.soton.ac.uk/403100/
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资源简介：
Data supporting the paper Dominguez Bucio, Thalia, Khokhar, Ali and Lacava, Cosimo et al. (2016) Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications. Journal of Physics D: Applied Physics
提供机构：
University of Southampton
创建时间：
2016-11-25
