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FDTD simulation of stack of 320 nm PAAO and various thickness DLC:Ag mixture in different mediums (AoI 45 deg., s-polarization)

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Zenodo2022-11-21 更新2026-04-07 收录
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https://zenodo.org/record/7341249
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FDTD software: Lumerical (Ansys, version 2021 R2.3). Structure: aluminum (Palik) substrate; 320 nm thickness (<em>h</em>e) aluminum oxide (Palik) layer with 35 nm diameter (<em>RPo</em>) cylindrical pores with 100 nm distance (<em>D</em>) between the pore centers (representing porous anodized aluminum oxide - PAAO); 35/50/65 nm thickness (<em>DLC</em>) layer with experimentally obtained optical properties of diamond-like carbon and silver nanocomposite (DLC:Ag). The pores extend through both PAAO and DLC:Ag layers as it was observed in SEM images. DLC:Ag optical properties are averaged result of the layer properties in DLC:Ag nanocomposite obtained by fitting spectroscopic ellipsometry data, which is available here: https://doi.org/10.5281/zenodo.7341684 The file used in the simulations is provided in this data set. Here DLC:Ag is considered as homogeneous materials without separating DLC and Ag phases. Refractive index of the surrounding medium (<em>n</em>): 1.0; 1.1; 1.2; 1.3. Simulation region: from 300 nm below the substrate/PAAO interface to 1.3 µm above PAAO surface; x and y spans are equal to one period of the structure. Mesh override region: from 50 nm below the PAAO to 50 nm above DLC:Ag; 2 nm step size in each direction. Light source: BFAST plane wave light source; 500 nm above PAAO; 45° angle of incidence (<em>ang</em>); 300 nm – 1000 nm wavelength range; s-polarization (<em>pol</em>). Monitor (frequency domain field and power): 2D Z-normal; 1 µm above PAAO; results are in "<em>_reflection.txt</em>" files. Information in the file name: <em>he</em> - thickness of PAAO; <em>DLC</em> - thickness of DLC:Ag; <em>pol</em> - polarization; <em>RPo</em> - diameter of pores; <em>D</em> - distance between pore centers; <em>ang</em> - angle of incidence; <em>n</em> - refractive index of surrounding medium. Files: (1) "<em>_reflection.txt</em>" - lambda(nm) (first column) - wavelength in nanometers; Y (second column) - T data from the monitor above the structure. (2) "<em>_p0.log</em>" - log file produced by the software while running the simulation. (3) "<em>.fsp</em>" - Lumerical software file containing the simulation project (license required to open these files). (4) "<em>Lumerical_Screenshots.pdf</em>" - shows software screenshots for every object and its every property; red text is added to show which values are different for different simulations. (5) "<em>Structure_Illustration.png</em>" - a schematic of modeled structure. (6) "PAAO320nm<em>.jpg</em>" - a preview of data from "<em>_reflection.txt</em>" files. (7) "<em>DLC_Ag_SE_nk_average.txt</em>" - contains DLC:Ag optical properties (first column - wavelength in nanometers; second column - refractive index; third column - extinction coefficient).
提供机构:
Jurkevičiūtė, Aušrinė
创建时间:
2022-11-21
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