Monte Carlo transport of sputtered Cu in Ar in the Eisenmenger-Sittner post-magnetron geometry: dataset

Raw Monte Carlo outputs, aggregated results, digitised measured angular distributions and all numbers underlying the article "Independent Monte Carlo implementation of the Eisenmenger-Sittner post-magnetron transport model for sputtered Cu" (A. Bouazza, submitted). Cu sputtered into Ar at 0.05–2 Pa; frozen baseline, diagnostics, cross-section and emission sensitivity, primary-energy sensitivity and a factorial cross-check with SPUTRA collision physics. See README.md for the file structure.