Ionization of sputtered material in high power impulse magnetron sputtering plasmas - comparison of titanium, chromium and aluminum

Experimental data set and modeling results to an upcoming publication titled: "Ionization of sputtered material in high power impulse magnetron sputtering plasmas - comparison of titanium, chromium and aluminum".

The dataset contains current and voltage measurements (current-voltage-XX.txt), Langmuir probe measurements (probe-XX.txt) performed 8 mm above the racetrack position (using the method described here https://doi.org/10.1088/1361-6595/ab5e46), model results as explained in the paper and spectroscopic imaging profiles. The spectroscopic imaging profiles are obtained from Abel-inverted images in the radial direction by integrating between z=1mm and z=3mm and in the axial direction between r=12mm and r=15mm.