XRF analysis using the MEMS x-ray source

These data contain experimental measurements and analysis supporting the development and evaluation of a miniature MEMS-based X-ray source designed for ultra-compact XRF (X-ray fluorescence) spectrometry, with particular emphasis on potential applications in in-situ extraterrestrial surface analysis. The dataset includes XRF spectra, emission parameters, operational settings of the MEMS X-ray source, and results from tests conducted on lunar regolith simulants both under high vacuum and ambient conditions.