Data-driven plasma modelling: Fluorocarbon ICP data set
收藏NIAID Data Ecosystem2026-03-14 收录
下载链接：
https://zenodo.org/record/7704878
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资源简介：
This is an open source dataset of optical emission spectra and optical images in fluorocarbon plasmas, along with associated tool logs, captured from a Oxford Intruments Plasma Technology PP100 ICP etcher. The dataset consists of Ar, O2, Ar/O2, CF4/O2 and SF6/O2 gas mixtures etching Si wafers.
The data has been split into chunks for uploading to Zenodo, to reconstruct them:
$ cat generative_model-fluorocarbon_data_set.tar.xz* > generative_model-fluorocarbon_data_set.tar.xz
$ tar -xvf generative_model-fluorocarbon_data_set.tar.xz
You can find the code to train an autoencoder model using the optical emission spectra and optical images at our github repo, https://github.com/gregdaly/generative_modelling_for_optical_plasma_diagnostics
创建时间：
2023-03-10
