Data for "Evaluating Metal-Organic Precursors for Focused Ion Beam Induced Deposition through Solid-Layer Decomposition Analysis"

Experimental Data for "Evaluating Metal-Organic Precursors for Focused Ion Beam Induced Deposition through Solid-Layer Decomposition Analysis" The collected experimental data for tested four different metal-organic precursor layers: 1 - [Cu2(μ-O2CtBu)4]n 2 - [Cu2(NH2(NH=)CC2F5)2(µ-O2CC2F5)4] 3 - [Cu2(µ-O2CC2F5)4] 4 - [Ag2(μ-O2CC2F5)2] BSE.zip - includes SEM BSE images of the precursor layers EDX.zip - inludes SEM EDX results of the precursor layers together with exemplary python jupyter notebook to analyze EDX hyperspectral data