Raw data files supplemental to paper titled "Site-control of InAs quantum dots on InP by droplet epitaxy in MOVPE".

Raw atomic force microscopy (AFM) data associated with the study of site-controlled InAs quantum dots on InP grown by droplet epitaxy in MOVPE. The dataset includes AFM measurements used to analyse the morphology of nanoholes, as well as the formation of droplets and the growth of quantum dots. The files contain the original AFM scan data used for the analysis and figures presented in the manuscript.