Diamond Schottky Barrier Diodes with Fully Covered Contacts on Deep-Etched Dr...

The measured data of diamond SBDs is used for the work: A fully covered (FC) Schottky contact structure, realized by retaining the Al hard mask during cyclic deep diamond...本项研究所采用的金刚石肖特基势垒二极管（Schottky Barrier Diodes, SBD）实测数据，对应的研究对象为：通过在循环深度金刚石工艺过程中保留铝硬掩模所制备的全覆盖（FC）肖特基接触结构……