Rigorous full 3D modeling of coherence scanning interferometry and confocal microscopy [Dataset]

In order to validate a rigorous simulation model for confocal microscopes and coherence scanning interferometers, measurements were performed by a home-built Linnik interferometer (100x, NA=0.95) and a commercial confocal microscope (150x, NA=0.95). The dataset contains image stacks obtained by the Linnik interferometer for TE-, TM-, and unpolarized light. Additionally, the gratings reconstructed using a combination of envelope and phase analysis are included. In case of the confocal microscope, image stacks are not available, so only the reconstructed grating is stored. For further discussion, an AFM measurement result (tip radius 10 nm) is given as well. <br>If you use the data please refer to our corresponding article mentioned below.