Luminescence properties of TeOx thin films annealing under an oxidizing atmosphere
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The DataSet contains the emission and excitation spectra of TeOx thin films. The material was obtained by the sol-gel method. The starting solution was prepared by mixing telluric acid (precursor) with thetraetylene glycol, water, and ethanol. The sol was obtained by vigorously stirring precursor solution at 50°C for 2h, then the temperature was raised to 75°C for the next 2h. Next, the sol was used to prepared thin films by a spin coating method. The corning glass with 8 nm alumina oxide was used as a substrate. After deposition, the thin films were dried at 200°C under an argon atmosphere, then were annealing at 400°C under oxidizing atmosphere. Luminescence emission and excitation spectra of gel were collected in a Horiba Yvon spectrofluorometer (Fluorolog 3).



