Dataset supporting University of Southampton Doctoral Thesis 'Displacement detection in silicon nano-optoelectromechanical systems (NOEMS) for the development of artificial intelligence hardware'

Dataset supporting University of Southampton Doctoral Thesis 'Displacement detection in silicon nano-optoelectromechanical systems (NOEMS) for the development of artificial intelligence hardware'.

The data is supporting Chapter 3 of the above thesis as well as used in electrical spectral analysis of thermomechanical noise and in conference presentation/paper 'Spectral characterisation and tuning effect of picometre-scale thermomechanical motion for silicon NEMS resonators' (September 2021).

Data contains folders with LVM files which were downloaded from the control PC (generated by LabVIEW) and TRC files downloaded directly from the electronic spectrum analyser, produced by NEMS device actuation and thermomechanical noise probing (including via optical interferometry, as in the folders containing photodetector outputs '\ThermomechanicalElectrical_FreeSpaceOptical\W2D12_RNEM29_SA_Opt_2021_08_06\W2DA_RNEM29\PDoutput' and '\ThermomechanicalElectrical_FreeSpaceOptical\W2DA_RNEM24\pd_output') respectively.

Process details (prober laser optical power, applied electrical gate voltages and signal powers, device designations, spectral analysis stage conditions such as attenuation) are included in file/folder names.

Spectral analyser settings and the spreadsheet (ODS and XLSX) files are also included.