Experimental dataset for: Monitoring of the initial stages of diamond growth on aluminium nitride using in-situ spectroscopic ellipsometry

This experimental dataset contains in-situ and ex-situ sample characterisation data of diamond films grown by microwave plasma-enhanced chemical vapour deposition (MPECVD) on aluminium nitride (AlN). Data includes: -In-situ SE spectra of diamond films during growth. -Ex-situ spectroscopic ellipsometry (SE) spectra of an AlN film prior to diamond growth. -Ex-situ spectroscopic ellipsometry (SE) spectra of diamond films. -Ex-situ Atomic force microscopy images of diamond films. -Ex-situ Raman spectra of diamond films.