Simulation results for the time evolution of plasma parameters in the ignition process of an Ar RF-CCP plasma discharge

Datasets related to the simulation of a RF-CCP discharge with parallalel square electrodes(distance 20 mm) working at pressures in renge 400-600 mTorr, RF peak bias voltages 100-400 V and RF bias frequencies 10-30 MHz. These data have been used for an article titled "Simulation of plasma parameters time evolution in the ignition process of an Ar RF-CCP plasma discharge" submitted to the journal Plasma Sources Science and Technology. Each file contains several directories, each one containing the output of a single simulation run. These are the names of the files contained in each subdirectory and their content: ccpla.conf : configuration used for the simulation ccpla.info : information about the simulation run ccpla.neutrals: neutral gas characteristics ccpla.V.csv : electric potential (each row is related to a different time) ccpla_eedf.csv : electron energy distribution (each row is related to a different time) ccpla_iedf_Ar+.csv : ion energy distribution (each row is related to a different time) ccpla_means_ele.csv : several electron properties (each row is related to a different time) ccpla_means_ion_A+.csv : several ion properties (each row is related to a different time) ccpla_potnetial.csv : spatial distribution of the electric potential along the direction normal to the electrodes ccpla_zpos_ele.csv : position of the electrons along the direction normal to the electrodes ccpla_zpos_ions_Ar+.csv : position of the ions along the direction normal to the electrodes