Data underlying the publication: Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation

The publication is focused on unravelling the contributions of two important factors to the blocking performance of small molecule inhibitors: steric shielding and chemical passivation, which was explored both experimentally and theoretically. The dataset contains the raw data, inputs and outputs files for simulations, images and tables for the manuscript.

本研究相关论文聚焦于阐明两大关键因素对小分子抑制剂（small molecule inhibitors）阻断性能的影响机制，所探讨的两大因素分别为空间位阻屏蔽（steric shielding）与化学钝化（chemical passivation），相关研究通过实验与理论相结合的方式开展。本数据集包含模拟所需的原始数据、输入与输出文件，以及论文手稿配套的图像与表格素材。