Optical data obtained during diamond film deposition on optical fiber end-face

<p>Dataset correspond to DOI: 10.1109/SENSORS59705.2025.11330631 The work reports a metal oxide double-layer optical fiber interferometer placed on the fiber tip for in situ diamond film growth monitoring. The diamond growth, at relatively low temperatures, was possible using a linear antenna microwave plasma-enhanced chemical vapor deposition setup. Initially, reflection from nanodiamond-seeded bare fiber tip was monitored to estimate the location-dependent deposition process effectiveness at different spots in the deposition chamber. This step facilitated aluminum/gadolinium oxide double-layer interferometric sensor positioning. It has been proven that the thin-film sensing structures withstood demanding environmental conditions, and thin diamond layers were successfully formed. Acquired data analysis supplemented with numerical calculations allowed for the estimation of process kinetics (4 nm/h) and surface sensitivity of the double-layer sensor (11.57 nm/nm).</p>