遇见数据集

PLC CWDM Wafer Fabrication Measurements

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Zenodo2025-09-01 更新2026-05-26 收录
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资源简介:

This dataset contains fabrication measurements from 2,790 wafers used to create coarse wavelength-division multiplexing (CWDM) planar lightwave circuit (PLC) devices. Each record corresponds to a specific wafer, fabrication operation, and parameter, with measurements captured across five spatial wafer regions: left, top, center, bottom, and right. The data includes operation metadata (e.g., layer, ID, name), parameter categories (e.g., ETCH_DEPTH, LAYER_THICKNESS), and temporal alignment using date_idx, min_date_idx, and max_date_idx. It supports research in spatiotemporal modeling, yield analysis, and fabrication excursion detection.

提供机构:
Zenodo
创建时间:
2025-07-18
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