Dataset of error manifolds for 8 industrial laser wavelengths.

Contents:- ArF error manifold data points.txt- KrF error manifold data points.txt - XeF error manifold data points.txt- Ar Ion error manifold data points.txt- He-Ne error manifold data points.txt- Kr Ion error manifold data points.txt- Ruby error manifold data points.txt- Ti:S error manifold data points.txt Each file contains 4 columns: rho, I_0, epsilon_quant, Zmax These data were generated by numerical integration of Eq.1 in the associated manuscript using hardware digitization parameters Delta_rho = 0.01 and rho_max = 66.22.