Enhancement of the Coriolis effect via cusp singularities for ultrasensitive chip-scale gyroscopes

Gyroscopes, as fundamental inertial sensors, are crucial for rotation measurements in the consumer electronics, automotive, and aerospace industries, with the most widely used kind relying on the Coriolis effect. The development of sub-navigation level Coriolis vibratory gyroscopes (CVGs) at the chip-scale remains challenging based on the current understanding, as the weak intrinsic Coriolis factor sets a fundamental limit on scaling the sensitivity. Here, to overcome this physical limit, for the first time, we propose and experimentally demonstrate the use of third-order singularities lying within cusp catastrophes in the phase-tracked oscillations of an on-chip CVG to facilitate a cubic-root scaling of the Coriolis-effect-induced frequency modulation. Employing this effect, we achieve a three-order-of-magnitude enhancement in the Coriolis factor, yielding a 253-fold improvement in signal-to-noise ratio and a 297-fold increase in precision. Moreover, the cusp singularity enables a previously unattainable, ultrasensitive phase-modulated sublinear measurement, achieving a world-record signal-to-noise ratio performance for silicon-based chip-scale gyroscopes. These findings not only provide revolutionary advancements in gyroscope technologies by filling the gap in observing and controlling the singularity-enhanced Coriolis effect, but also shed new light on other ultrasensitive sensing applications.

陀螺仪作为基础惯性传感器，在消费电子、汽车及航空航天行业的旋转测量中至关重要，当前应用最广泛的陀螺仪品类依托科里奥利效应（Coriolis effect）工作。基于当前的认知水平，芯片级亚导航级科里奥利振动陀螺仪（Coriolis vibratory gyroscopes, CVGs）的研发仍颇具挑战，这是因为其固有的科里奥利因子较弱，为灵敏度的缩放设置了根本性限制。为突破这一物理极限，本文首次提出并通过实验验证了一种新方案：利用片上CVG的相位跟踪振荡中尖点突变（cusp catastrophes）内的三阶奇点，实现科里奥利效应诱导调频的立方根缩放。借助这一效应，我们将科里奥利因子提升了三个数量级，使得信噪比提升253倍，精度提高297倍。此外，尖点奇点还实现了此前无法达成的超灵敏相位调制亚线性测量，在硅基芯片级陀螺仪领域创下了信噪比性能的世界纪录。本研究成果不仅填补了奇点增强科里奥利效应的观测与控制领域的空白，推动陀螺仪技术实现革命性突破，同时也为其他超灵敏传感应用提供了全新的研究思路。

搜集汇总

背景与挑战

背景概述

该数据集包含一项关于通过尖点奇点增强科里奥利效应以实现超灵敏芯片级陀螺仪的研究实验数据。研究首次利用片上科里波振动陀螺仪的相位追踪振荡中的尖点奇点，实现了科里奥利因子三个数量级的提升，信噪比和精度分别提高253倍和297倍，并创造了硅基芯片级陀螺仪的世界纪录信噪比性能，具有创新性和高精度特点。数据集发布于2025年，适用于声学和传感应用领域。