Raw_Cam_data_spectrometer_reference_and_linescan

Raw spectra recorded with a reflection grating and CCD with 13.5µm Pixel size. Exposure times are in the filename. Linescan data is reflected signal with an AOI of 72° to the surface normal. Reference data describes the illumination spectrum, recorded in transmission without a sample. Camera was shifted between 0th order and 1st order. Sample was a layer system consisting of approx. 70nm Al2O3 on ZnO. In some region (and some data points) an additional 20nm Pt layer was between Al2O3 and ZnO. Evaluation of the data is presented in "Soft X-ray imaging with coherence tomography in the water window spectral range using high-harmonic generation" at LSA.