Investigation of long-term distance measurement repeatability in a large-range nanopositioning machine combined with a laser focus sensor

This dataset consists of the measurement repeatability of a nanopositioning machine equipped with a laser focus sensor (LFS). The highlights of the results are: The combination of nanopositioning machine and laser focus sensor allows for dimensional measurements close to sub-10 nm performance over a large range. Laser focus sensor is a potential sensor to lateral measurements using high contrast reflection artifact with have the advantage of point measurement principle with can fulfill the Abbe principle and integration into real-time feedback loops for height control. Estimation of a design without a metrology frame influence results in a considerable nanometer range. The system operates within a volume of Ø200 mm x 25 mm and implements 6-DOF positioning control based on direct magnetic drives, differential laser interferometers and an autocollimator. The integrated LFS makes it suitable for a wide range of applications. Experimental evaluations showed remarkable repeatability results in large-range distance measurements, with standard deviation values below 15 nm over a range of 155 mm. This work was presented at the 20th International Conference on Precision Engineering (ICPE2024) in Sendai on 26 October 2024. https://web.tohoku.ac.jp/nanometrology/icpe2024/indexHomepage.html