Raw measurement data of SLM calibration: Inline calibration of spatial light modulators in nonlinear microscopy

The raw data files of the phase and amplitude response calibration of a spatial light modulator (SLM, Meadowlark 1920x1152 XY Phase Series). We have calibrated the SLM with two different methods: a Twymann-Green (TG) interferometric setup with Fourier fringe analysis, and our new inline calibration method. The new inline method is suitable for nonlinear microscopy. For both calibration methods, the same laser (Spectra-Physics, Mai Tai) was used at a wavelength of 804nm, but with different output powers and operational modes. The TG measurement was performed with low laser output power (0.14 W) in continuous wave (CW) mode, while our inline measurement was performed at high laser output power (2.6 W) in pulsed mode.