Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms: supporting data

Name: Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms: supporting data
Creator: University of York
Published: 2017-11-08T08:44:42+08:00

DataCite Commons2022-10-14 更新2026-05-07 收录

射频等离子体控制

离子电导率优化

数据链接：

https://pure.york.ac.uk/portal/en/datasets/3769f706-3c5d-4594-9083-73e9fb99de09 数据链接链接失效反馈

官方服务：

资源简介：

Data required to reproduce the results presented in the paper "Enhanced control of the ionization rate in radio-frequency plasmas with structured electrodes via tailored voltage waveforms" Funded by EPSRC Doctoral Training Partnership grant EP/M508196/1

提供机构：

University of York

创建时间：

2017-11-08