Benchmark data for fluid modelling of low-pressure CCRF discharge plasmas
收藏DataCite Commons2020-09-20 更新2024-07-13 收录
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https://www.inptdat.de/node/72
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资源简介：
The dataset contains data from comparative studies of capacitively coupled radio-frequency (CCRF) discharges in helium and argon at pressures between 10 and 80 Pa applying two different fluid modeling approaches as well as two independently developed particle-in-cell Monte Carlo collision (PIC-MCC) codes. The dataset provides a test bed for future studies of simple ccrf discharge configurations in helium and argon at pressures ranging from 10 to 80 Pa.
提供机构：
INPTDAT
创建时间：
2019-07-10
