4D-STEM dataset from Arina with different conditions for lecture and exercise

This is the datasets acquired on a Spectra 200 TEM using DECTRIS Arina detector for lecture and exercise in Materials Science department at FAU Erlangen-Nuremberg.

The purpose of the exercise is to Deepen the understanding of STEM image formation and typical contrast mechanisms when using different setups and conditions.

Sample: Si solar cell in cross-sectionExperiments: STEM probe with various convergence angles (small, medium, large)Probe current: ~30 - 100 pADwell time: 10 and 40 usScan field size: 512x512 pixels (various step size that define field of view)

Description of datasets:

“0p5mrad_000_master.h5”: large FoV scan (Si/SiOx TiN and Al), α = 0.5 mrad , CL125mm

“7p5mrad_001_master.h5”: high magnification (Si/SiOx TiN interface region), α = 7.5 mrad , CL62mm“7p5mrad_002_master.h5”: large FoV scan (Si/ SiOx TiN and Al), α = 7.5 mrad , CL62mm“7p5mrad_003_master.h5”: large FoV scan (Si/ SiOx TiN and Al), α = 7.5 mrad , longer camera length, CL125mm

“15mrad_000_master.h5”: high magnification (Si/SiOx TiN interface region), α = 15 mrad , long camera length, CL125mm“15mrad_001_master.h5”: high magnification (Si/SiOx TiN interface region), α = 15 mrad , short camera length, CL62mm“15mrad_002_master.h5”: large FoV scan (Si/ SiOx TiN and Al), α = 15 mrad , long camera length CL125mm

“30mrad_001_master.h5”: high magnification, α = 30 mrad , faster scan (10us pixel time, 96x96 detector), CL62mm“30mrad_002_master.h5”: high magnification, α = 30 mrad , CL62mm“30mrad_003_master.h5”: high magnification, α = 30 mrad , CL62mm“30mrad_004_master.h5”: large FoV scan (Si/ SiOx TiN and Al), α = 30 mrad , CL62mm“30mrad_005_master.h5”: high magnification, α = 30 mrad , CL62mm

Further metadata can be found in the corresponding .h5 files.

You may use Dectris NOVENA software to examine the datasets:https://eistools.com/novena 4d stem