The data of the article "Significantly suppression of residual nitrogen incorporation in diamond film with a novel susceptor geometry employed in MPCVD"

This work proposed to change the structure of the sample susceptor of the microwave plasma chemical vapor deposition (MPCVD) reaction chamber, that is, to introduce a small hole in the center of the susceptor to study its suppression effect on the incorporation of residual nitrogen in the MPCVD diamond film. Using COMSOL multiphysics software simulation, the plasma characteristics and the concentration of chemical reactants in the cylindrical cavity of MPCVD system were studied.The data related to the article was published in the journal of Chinese Physics B,including electron number density, electron temperature, electric field intensity, potential and the concentration of hydrogen atom, methyl and nitrogenous substances.