光场均匀性仿真及实验数据
收藏科学数据银行2024-04-16 更新2026-04-23 收录
下载链接：
https://www.scidb.cn/detail?dataSetId=9bb3bde7827a4e538cf8b41348dd61ed
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资源简介：
This dataset is the experimental data of the paper "Measurement and Optimization of Writing Light Field Uniformity in Dual galvanometer Laser Scanning Lithography System", which includes measurement data, simulation parameters, simulation results, experimental results, electron microscopy images, and microscopic images
提供机构：
Shanghai Institute of Optics and Fine Mechanics
创建时间：
2024-03-14
