Replication package for "Robust Machine Prioritization in Semiconductor Manufacturing Using LOPCOW–RAM: Cross-Method and Monte Carlo Robustness Analysis"

This package contains the simulation code, simulation outputs and multi-criteria decision analysis workbook for the study “Robust Machine Prioritization in Semiconductor Manufacturing Using LOPCOW–RAM: Cross-Method and Monte Carlo Robustness Analysis”. A 180-day reduced-order discrete-event simulation of toolgroup Dielectric_BE_21 in SMT2020 Dataset 2 (low-volume/high-mix) generates thirteen machine-state criteria for six parallel tools. Lots are assigned to the tools by minimum projected completion delay. The decision matrix is the mean of each criterion over 935 eligible decision epochs within ±7 days of day 135. The Excel workbook contains the full analysis as live formulas: LOPCOW weights, RAM ranking and shortfall decomposition, thirteen benchmark MCDM methods, six alternative weighting schemes, leave-one-criterion-out, one-at-a-time and Monte Carlo analyses (10,000 runs each for weights and data), and rank-reversal tests. The SMT2020 testbed data are not redistributed; instructions for obtaining them are in 01_input/.