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Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe (Data)

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Zenodo2021-02-03 更新2026-05-25 收录
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Raw data, Ansys Workbench Projects and figures used for the article "Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe", published in the proceedings of SMSI 2020, which did not take place because of Covid-19 virus pandemic. The data can be opened by a text editor<br> Ansys projects are compressed using 7-Zip and can be opened by Ansys Workbench.

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2021-02-03
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