Angle Monitor of Micromirror Array for Freeform Illumination in Lithography Systems
收藏科学数据银行2024-02-01 更新2026-04-23 收录
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资源简介：
In this paper, we propose an angle monitor to ensure the high-precision tilting of thousands of biaxialmicromirrors. As one of the critical modules for closed-loop control of the two-dimensional micromirror array, the online monitor feeds the monitored high-precision tilt angle back to the processing system. The angle monitor mainly consists of the spot scanning module and the angle detection module.
提供机构：
Shanghai Institute of Optics and Fine Mechanics; Aijun Zeng; Jingpei Hu; Huijie Huang; Zenghui Yang
创建时间：
2024-01-31
