Electron Energy Transport in α/DA Modes of Oxygen Capacitively Coupled Discharges

This article uses the self-developed 1d3V (one-dimensional configuration space, three-dimensional velocity space) particle grid/Monte Carlo (PIC/MCC) simulation program ASTRA to conduct numerical simulations of parallel plate capacitive coupled oxygen discharge. This dataset contains 8 files, with file names corresponding to the order of the eight images in the paper. The specific contents of each file are as follows: Figure 1 contains a structural diagram of a capacitive coupled RF plasma source; Figure 2 contains data on electron number density, electric field, and electron collision ionization rate at frequencies of 30 MHz and 10 MHz. The datasets corresponding to a1-c1 and a2-c2 are used to draw the corresponding subgraphs a1-c1 and a2-c2 in the paper; The file in Figure 3 contains energy density and various transport term data at frequencies of 30 MHz and 10 MHz, and the dataset naming is consistent with the corresponding description in the paper; In Figure 4, the dataset corresponding to 30 MHz is used to draw Figure 4 (a1-b1) of the paper, and the dataset corresponding to 10 MHz is used to draw Figure 4 (a2-b2) of the paper; Figure 5 contains the mechanical energy density and various transport term data at frequencies of 30 MHz and 10 MHz; In the file of Figure 6, the dataset corresponding to 30 MHz is used to draw Figure 6 (a1-b1) of the paper, and the dataset corresponding to 10 MHz is used to draw Figure 6 (a2-b2) of the paper; Figure 7 contains the thermal energy density and various transport term data at frequencies of 30 MHz and 10 MHz; In the file of Figure 8, the dataset corresponding to 30 MHz is used to draw Figure 8 (a1-b1) of the paper, and the dataset corresponding to 10 MHz is used to draw Figure 8 (a2-b2) of the paper. All of the above data were processed using Mathematica software.