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Research on the forward design methodology for ultra-precision grinding equipment of high-power laser components

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中国科学数据2026-03-31 更新2026-04-25 收录
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https://www.sciengine.com/AA/doi/10.1360/SST-2025-0425
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This paper proposes a forward design method for the design of ultra-precision grinding equipment for high-power laser components. By analyzing the forming characteristics of large-scale, low-gradient aspheric surfaces and rotational optical elements, and based on two grinding principles—parallel grinding with a raster path and spiral path grinding—the basic machine tool configurations of T-type layout and gantry structure are determined. An error model of the machine tool is established using multi-body system theory. An error sensitivity analysis method, employing grinding trajectory deviation as the evaluation index, is proposed. Furthermore, a model for optimizing the allocation of machine tool accuracy is constructed. Using the MATLAB fmincon solver, the required machine accuracy specifications meeting the machining requirement of PV ≤ 5 μm, are obtained. A lightweight and stiffness-coordinated design for key structural components is conducted through topology optimization, reducing the deformation fluctuation of the machine guideways from 1.17 to 0.83 μm, thereby ensuring the guaranteed accuracy specifications. A virtual prototyping system integrating process design, motion simulation, and collision warning is developed to achieve digital validation of the machining process. The developed UPG80 and UPG200 ultra-precision grinding machines have been successfully applied to the high-precision machining of aspheric components with apertures of 430 and 530 mm, achieving a surface form accuracy of PV ≤ 5 μm. This work provides a systematic technical pathway for the independent innovation of manufacturing equipment for high-power laser components.
创建时间:
2026-02-13
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