Data accompanying the publication: Limits of detection of defects near edges of nanostructures for coherent Fourier scatterometry

Authors (publication): Anubhav Paul, Silvania F. Pereira <br>This dataset contains the simulated scan-profile data and MATLAB plotting scripts supporting the results in the SPIE publication “Limits of detection of defects near edges of nanostructures for coherent Fourier scatterometry”. Each dataset file corresponds to a single normalized scan profile used to generate the curves in the article, representing different defect scenarios and positions relative to an edge. The accompanying MATLAB code loads these profiles and reproduces the figure plots for transparency, reproducibility, and reuse in related coherent Fourier scatterometry / optical metrology studies.